Detection and Characterisation of 'Sleeping' Defects in Silicon by LBIC Scan Maps at 80 K. |
| Journal |
Solid State Phenomena (Volumes 63 - 64) |
| Volume |
Beam Injection Assessment of Defects in Semiconductors |
| Edited by |
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter |
| Pages |
53-60 |
| DOI |
10.4028/www.scientific.net/SSP.63-64.53 |
| Citation |
Santo Martinuzzi et al., 1998, Solid State Phenomena, 63-64, 53 |
| Authors |
Santo Martinuzzi, Isabelle Périchaud, Scott A. McHugo |
| Keywords |
Dislocations, Grain Boundary, LBIC Contrast, Minority Carrier Diffusion Length, Thermal Treatment |
| Full Paper |
Get the full paper by clicking here
|
