Paper Title:
EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 63-64)
Edited by
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Pages
97-104
DOI
10.4028/www.scientific.net/SSP.63-64.97
Citation
S. Spiga, A. Castaldini, A. Cavallini, M. L. Polignano, F. Cazzaniga, "EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon", Solid State Phenomena, Vols. 63-64, pp. 97-104, 1998
Online since
December 1998
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Price
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