EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon |
| Journal |
Solid State Phenomena (Volumes 63 - 64) |
| Volume |
Beam Injection Assessment of Defects in Semiconductors |
| Edited by |
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter |
| Pages |
97-104 |
| DOI |
10.4028/www.scientific.net/SSP.63-64.97 |
| Citation |
S. Spiga et al., 1998, Solid State Phenomena, 63-64, 97 |
| Authors |
S. Spiga, Antonio Castaldini, Anna Cavallini, Maria Luisa Polignano, F. Cazzaniga |
| Keywords |
Atomic Force Microscope (AFM), Denuded Zones, EBIC, Intrinsic Gettering, Minority Carrier Diffusion Length, Oxygen Precipitation |
| Full Paper |
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