Paper Title:
The Rinsing Problem: Effect of Solute-Surface Interactions on Wafer Purity
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
1-6
DOI
10.4028/www.scientific.net/SSP.65-66.1
Citation
L. M. Loewenstein, P. W. Mertens, "The Rinsing Problem: Effect of Solute-Surface Interactions on Wafer Purity", Solid State Phenomena, Vols. 65-66, pp. 1-6, 1999
Online since
November 1998
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Price
$35.00
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