Paper Title:
Silicon Contamination Prevention in HF Mixtures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
101-104
DOI
10.4028/www.scientific.net/SSP.65-66.101
Citation
V. Bertagna, F. Rouelle, R. Erre, M. Chemla, "Silicon Contamination Prevention in HF Mixtures", Solid State Phenomena, Vols. 65-66, pp. 101-104, 1999
Online since
November 1998
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Price
$32.00
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