Silicon Contamination Prevention in HF Mixtures |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces IV |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 101-104 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.101 |
| Citation | V. Bertagna et al., 1998, Solid State Phenomena, 65-66, 101 |
| Authors | V. Bertagna, F. Rouelle, R. Erre, M. Chemla |
| Keywords | Contamination, HF, Hydrofluoric Acid (HF), Silicon |
| Full Paper | 
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