Paper Title:
Applications of Tetramethylammoninium Hydroxide (TMAH) as a Post Tungsten CMP Cleaning Mixture
  Abstract

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Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
105-108
DOI
10.4028/www.scientific.net/SSP.65-66.105
Citation
M. Jolley, "Applications of Tetramethylammoninium Hydroxide (TMAH) as a Post Tungsten CMP Cleaning Mixture", Solid State Phenomena, Vols. 65-66, pp. 105-108, 1999
Online since
November 1998
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Price
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