Fe and Cu Removal Efficiency in HF-DIW/O3 Cleaning Sequence |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
109-112 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.109 |
| Citation |
Francesco Pipia et al., 1998, Solid State Phenomena, 65-66, 109 |
| Authors |
Francesco Pipia, Enrico Bellandi, Barbara Crivelli, Mauro Alessandri |
| Keywords |
Cleaning, Metal Removal, Ozone |
| Full Paper |
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