Paper Title:
Behaviour of Metallic Contaminants during Mos Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
11-14
DOI
10.4028/www.scientific.net/SSP.65-66.11
Citation
T. Bearda, S. De Gendt, L. M. Loewenstein, M. Knotter, P. W. Mertens, M. M. Heyns, "Behaviour of Metallic Contaminants during Mos Processing", Solid State Phenomena, Vols. 65-66, pp. 11-14, 1999
Online since
November 1998
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Price
$32.00
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