Paper Title:
Post Polysilicon Etch (Incorporating DUV Resist an BARC) Polymer Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
113-116
DOI
10.4028/www.scientific.net/SSP.65-66.113
Citation
S. Y.M. Chooi, P.-Y. Ee, B.-M. Seah, M. S. Zhou, "Post Polysilicon Etch (Incorporating DUV Resist an BARC) Polymer Cleaning", Solid State Phenomena, Vols. 65-66, pp. 113-116, 1999
Online since
November 1998
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Price
$35.00
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