Evaluation of Cleaning Recipes Based on Ozonated Water for Pre-Gate Oxide Cleaning |
|
| Journal | Solid State Phenomena (Volumes 65 - 66) |
|---|---|
| Volume | Ultra Clean Processing of Silicon Surfaces IV |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 119-122 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.119 |
| Citation | Joong S. Jeon et al., 1998, Solid State Phenomena, 65-66, 119 |
| Authors | Joong S. Jeon, Bob Ogle, M. Baeyens, Paul W. Mertens |
| Full Paper | 
Get the full paper by clicking here
|
First page example
