Paper Title:
Evaluation of Cleaning Recipes Based on Ozonated Water for Pre-Gate Oxide Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
119-122
DOI
10.4028/www.scientific.net/SSP.65-66.119
Citation
J. S. Jeon, B. Ogle, M. Baeyens, P. W. Mertens, "Evaluation of Cleaning Recipes Based on Ozonated Water for Pre-Gate Oxide Cleaning", Solid State Phenomena, Vols. 65-66, pp. 119-122, 1999
Online since
November 1998
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