Paper Title:
Wet Metal Etching for Ti/Co Self-Aligned Silicides
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
131-134
DOI
10.4028/www.scientific.net/SSP.65-66.131
Citation
S. O'Brien, "Wet Metal Etching for Ti/Co Self-Aligned Silicides", Solid State Phenomena, Vols. 65-66, pp. 131-134, 1999
Online since
November 1998
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Price
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