Paper Title:
Post-Titanium-Salicide Cleaning with Spray Technology
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
135-138
DOI
10.4028/www.scientific.net/SSP.65-66.135
Citation
J. Diedrick, A. Mauri, V. Nguyen, "Post-Titanium-Salicide Cleaning with Spray Technology", Solid State Phenomena, Vols. 65-66, pp. 135-138, 1999
Online since
November 1998
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Price
$32.00
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