Hydrogen Peroxide Decomposition in Ammonia Solutions |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
15-18 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.15 |
| Citation |
D. Martin Knotter et al., 1998, Solid State Phenomena, 65-66, 15 |
| Authors |
D. Martin Knotter, Stefan De Gendt, M. Baeyens, Paul W. Mertens, Marc M. Heyns |
| Keywords |
Decomposition of H2O2, Metal Contamination, Reaction Kinetics, SC1 |
| Full Paper |
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