Hydrogen Peroxide Decomposition in Ammonia Solutions |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 15-18 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.15 |
| Authors | D. Martin Knotter, Stefan De Gendt, M. Baeyens, Paul W. Mertens, Marc M. Heyns |
| Keywords | Decomposition of H2O2, Metal Contamination, Reaction Kinetics, SC1 |
| Full Paper | 
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