Paper Title:
Construction of the Distribution System for Ozonized Water Used in the Wet Cleaning of Si Wafer Surface
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
161-164
DOI
10.4028/www.scientific.net/SSP.65-66.161
Citation
O. Nakamura, M. Yoshida, Y. Shirai, M. Nagase, M. Kitano, M. Gozyuki, Y. Hashimoto, T. Ohmi, "Construction of the Distribution System for Ozonized Water Used in the Wet Cleaning of Si Wafer Surface", Solid State Phenomena, Vols. 65-66, pp. 161-164, 1999
Online since
November 1998
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Price
$32.00
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