Paper Title:
Post CMP Cleaning Using a Novel HF Compatible High Power Magasonic Tank
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
169-172
DOI
10.4028/www.scientific.net/SSP.65-66.169
Citation
F. Tardif, T. Lardin, I. Constant, M. Fayolle, P. Boelen , C. Cowache, I. Kashkoush, R. Novak, "Post CMP Cleaning Using a Novel HF Compatible High Power Magasonic Tank", Solid State Phenomena, Vols. 65-66, pp. 169-172, 1999
Online since
November 1998
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Price
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