Paper Title:
Relation between Oxide-CMP Induced Defects and Post-CMP Cleaning Strategies
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
173-176
DOI
10.4028/www.scientific.net/SSP.65-66.173
Citation
K. Devriendt, E. Vrancken, N. Heylen, J. Grillaert, M. Meuris, M. M. Heyns, Z.C. Lin, "Relation between Oxide-CMP Induced Defects and Post-CMP Cleaning Strategies", Solid State Phenomena, Vols. 65-66, pp. 173-176, 1999
Online since
November 1998
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Price
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