Paper Title:
Evaluation of Post Metal Etch Cleaning by Analyzing the Chemical Compositions and Distributions on the Etched Al Surface
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
177-180
DOI
10.4028/www.scientific.net/SSP.65-66.177
Citation
H. L. Li, M. R. Baklanov, W. Boullart, T. Conard, B. Brijs, W. Vandervorst, K. Maex, L. Froyen, "Evaluation of Post Metal Etch Cleaning by Analyzing the Chemical Compositions and Distributions on the Etched Al Surface", Solid State Phenomena, Vols. 65-66, pp. 177-180, 1999
Online since
November 1998
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Price
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