Paper Title:

Evaluation of a Dry Laser Cleaning Process for the Removal of Surface Particles

Periodical Solid State Phenomena (Volumes 65 - 66)
Main Theme Ultra Clean Processing of Silicon Surfaces IV
Edited by Marc Heyns, Marc Meuris and Paul Mertens
Pages 187-190
DOI 10.4028/www.scientific.net/SSP.65-66.187
Citation Guy Vereecke et al., 1998, Solid State Phenomena, 65-66, 187
Authors Guy Vereecke, Erika Röhr, Marc M. Heyns
Keywords Cleaning Efficiency, Laser Cleaning, Radiance ProcessTM
Price US$ 28,-
Article Preview
View full size