Evaluation of a Dry Laser Cleaning Process for the Removal of Surface Particles |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces IV |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 187-190 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.187 |
| Citation | Guy Vereecke et al., 1998, Solid State Phenomena, 65-66, 187 |
| Authors | Guy Vereecke, Erika Röhr, Marc M. Heyns |
| Keywords | Cleaning Efficiency, Laser Cleaning, Radiance ProcessTM |
| Full Paper | 
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