Paper Title:
Evaluation of a Dry Laser Cleaning Process for the Removal of Surface Particles
| Periodical |
Solid State Phenomena (Volumes 65 - 66)
|
| Main Theme |
Ultra Clean Processing of Silicon Surfaces IV
|
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
187-190 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.187 |
| Citation |
Guy Vereecke et al., 1998, Solid State Phenomena, 65-66, 187 |
| Authors |
Guy Vereecke, Erika Röhr, Marc M. Heyns |
| Keywords |
Cleaning Efficiency, Laser Cleaning, Radiance ProcessTM |
| Price |
US$ 28,- |