Paper Title:
Integrated Cleaning: Application of Densified Fluid Cleaning (DFC) to Post-Etch Residue Removal
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
195-198
DOI
10.4028/www.scientific.net/SSP.65-66.195
Citation
V. Starov, D. Beery, A. Kabansky, "Integrated Cleaning: Application of Densified Fluid Cleaning (DFC) to Post-Etch Residue Removal", Solid State Phenomena, Vols. 65-66, pp. 195-198, 1999
Online since
November 1998
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Price
$32.00
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