Paper Title:

Surface Characterization in the Silicon Cleaning Process by a-UPC; Atmospheric Ultraviolet Photoelectron Counting

Periodical Solid State Phenomena (Volumes 65 - 66)
Main Theme Ultra Clean Processing of Silicon Surfaces IV
Edited by Marc Heyns, Marc Meuris and Paul Mertens
Pages 203-206
DOI 10.4028/www.scientific.net/SSP.65-66.203
Citation Y. Kôzuki et al., 1998, Solid State Phenomena, 65-66, 203
Authors Y. Kôzuki, Y. Nakajima, T. Sato, Kei Kinoshita, T. Tsunoda
Keywords Ozonized Water, Photoelectron, Spin Process
Price US$ 28,-
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