Paper Title:
Surface Characterization in the Silicon Cleaning Process by a-UPC; Atmospheric Ultraviolet Photoelectron Counting
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
203-206
DOI
10.4028/www.scientific.net/SSP.65-66.203
Citation
Y. Kôzuki, Y. Nakajima, T. Sato, K. Kinoshita, T. Tsunoda, "Surface Characterization in the Silicon Cleaning Process by a-UPC; Atmospheric Ultraviolet Photoelectron Counting", Solid State Phenomena, Vols. 65-66, pp. 203-206, 1999
Online since
November 1998
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