Paper Title:
Surface Characterization in the Silicon Cleaning Process by a-UPC; Atmospheric Ultraviolet Photoelectron Counting
| Periodical |
Solid State Phenomena (Volumes 65 - 66)
|
| Main Theme |
Ultra Clean Processing of Silicon Surfaces IV
|
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
203-206 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.203 |
| Citation |
Y. Kôzuki et al., 1998, Solid State Phenomena, 65-66, 203 |
| Authors |
Y. Kôzuki, Y. Nakajima, T. Sato, Kei Kinoshita, T. Tsunoda |
| Keywords |
Ozonized Water, Photoelectron, Spin Process |
| Price |
US$ 28,- |