Paper Title:
A New HF Vapor Process for Native Oxide Removal, Suited for Cluster Applications
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
225-228
DOI
10.4028/www.scientific.net/SSP.65-66.225
Citation
A.B. Storm, H. Sprey, J.W. Maes, E. Granneman, R. de Blank, E. Röhr, M. Caymax, M. M. Heyns, "A New HF Vapor Process for Native Oxide Removal, Suited for Cluster Applications", Solid State Phenomena, Vols. 65-66, pp. 225-228, 1999
Online since
November 1998
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Price
$32.00
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