Paper Title:
Silicon Surface Cleaning for Low Temperature Silicon Epitaxial Growth
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
229-232
DOI
10.4028/www.scientific.net/SSP.65-66.229
Citation
M. Mayuzumi, M. Imai, S. Nakahara, K. Inoue, J. Takahashi, T. Ohmi, "Silicon Surface Cleaning for Low Temperature Silicon Epitaxial Growth", Solid State Phenomena, Vols. 65-66, pp. 229-232, 1999
Online since
November 1998
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.