Single Step Alkaline Cleaning Solution for Advanced Semiconductor Cleaning |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
23-26 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.23 |
| Authors |
M. Baeyens,
W. Hub,
Bernd O. Kolbesen,
A.R. Martin,
Paul W. Mertens
|
| Keywords |
Complexing Agent, Dilute SC-1, Gate Oxide Integrity, Metal Precipitation, RCA Modification, SC-1 Cleaning |
| Full Paper |
Get the full paper by clicking here
|
