Paper Title:
Role of UV/Chlorine Exposure during Dry Surface Conditioning before Integrated Epi Deposition Process
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
233-236
DOI
10.4028/www.scientific.net/SSP.65-66.233
Citation
J. Ruzyllo, E. Röhr, M. Caymax, M. Baeyens, T. Conard, P. W. Mertens, M. M. Heyns, "Role of UV/Chlorine Exposure during Dry Surface Conditioning before Integrated Epi Deposition Process", Solid State Phenomena, Vols. 65-66, pp. 233-236, 1999
Online since
November 1998
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Price
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