Paper Title:
Electrical Evaluation of the Epi/Substrate Interface Quality after Different In-Situ and Ex-Situ Low-Temperature Pre-Epi Cleaning Methods
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
237-240
DOI
10.4028/www.scientific.net/SSP.65-66.237
Citation
M. Caymax, S. Decoutere, E. Röhr, W. Vandervorst, M. M. Heyns, H. Sprey, A.B. Storm, J.W. Maes, "Electrical Evaluation of the Epi/Substrate Interface Quality after Different In-Situ and Ex-Situ Low-Temperature Pre-Epi Cleaning Methods", Solid State Phenomena, Vols. 65-66, pp. 237-240, 1999
Online since
November 1998
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Price
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