Metal Enhanced Oxidation of Silicon |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
245-248 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.245 |
| Citation |
M. Börner et al., 1998, Solid State Phenomena, 65-66, 245 |
| Authors |
M. Börner, N. Junghans, S. Landau, Bernd O. Kolbesen |
| Keywords |
Al Contamination, Cu Contamination, Enhanced Oxide Growth, SC-1 Solution |
| Full Paper |
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