Paper Title:
Metal Enhanced Oxidation of Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
245-248
DOI
10.4028/www.scientific.net/SSP.65-66.245
Citation
M. Börner, N. Junghans, S. Landau, B. O. Kolbesen, "Metal Enhanced Oxidation of Silicon", Solid State Phenomena, Vols. 65-66, pp. 245-248, 1999
Online since
November 1998
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.