Paper Title:
Effect of Si Surface Roughness on the Current-Voltage Characteristics of Ultra-Thin Gate Oxides
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
249-252
DOI
10.4028/www.scientific.net/SSP.65-66.249
Citation
M. Houssa, T. Nigam, P. W. Mertens, M. M. Heyns, "Effect of Si Surface Roughness on the Current-Voltage Characteristics of Ultra-Thin Gate Oxides", Solid State Phenomena, Vols. 65-66, pp. 249-252, 1999
Online since
November 1998
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