Paper Title:
Evaluation of C3F8 as an In-Situ Cleaning Gas for PECVD Tools
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
261-266
DOI
10.4028/www.scientific.net/SSP.65-66.261
Citation
R. Van San, L. Zazera, "Evaluation of C3F8 as an In-Situ Cleaning Gas for PECVD Tools", Solid State Phenomena, Vols. 65-66, pp. 261-266, 1999
Online since
November 1998
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Price
$32.00
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