Paper Title:
Particle Removal Efficiency and Silicon Roughness in HF-DIW/O3/Megasonics Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
27-30
DOI
10.4028/www.scientific.net/SSP.65-66.27
Citation
M. Alessandri, E. Bellandi, F. Pipia, F. Cazzaniga, K. Wolke, M. Schenkl, "Particle Removal Efficiency and Silicon Roughness in HF-DIW/O3/Megasonics Cleaning", Solid State Phenomena, Vols. 65-66, pp. 27-30, 1999
Online since
November 1998
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Price
$32.00
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