Paper Title:
Characterization of HF Cleaning of Ion-Implanted Si Surfaces
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
271-274
DOI
10.4028/www.scientific.net/SSP.65-66.271
Citation
E. Kondoh, M. R. Baklanov, K. Maex, "Characterization of HF Cleaning of Ion-Implanted Si Surfaces", Solid State Phenomena, Vols. 65-66, pp. 271-274, 1999
Online since
November 1998
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Price
$32.00
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