Paper Title:
Determination of SC1 Etch Rates at Low Temperatures with Microscope Interferometry
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
275-278
DOI
10.4028/www.scientific.net/SSP.65-66.275
Citation
W. Storm, H.A. Gerber, G.-F. Hohl, M. Naujok, R. Schmolke, "Determination of SC1 Etch Rates at Low Temperatures with Microscope Interferometry", Solid State Phenomena, Vols. 65-66, pp. 275-278, 1999
Online since
November 1998
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Price
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