Paper Title:
Post Metal Etch Polymer Removal: An Investigation of Parameters that Influence Corrosion
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
283-286
DOI
10.4028/www.scientific.net/SSP.65-66.283
Citation
W. Boullart, G. Mannaert, S. Graham, C. Tarassenko, L. Mouche, "Post Metal Etch Polymer Removal: An Investigation of Parameters that Influence Corrosion", Solid State Phenomena, Vols. 65-66, pp. 283-286, 1999
Online since
November 1998
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Price
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