Paper Title:
A Process Using Ozonated Water Solutions to Remove Photoresist after Metallization
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
287-290
DOI
10.4028/www.scientific.net/SSP.65-66.287
Citation
S.L. Nelson, L.E. Carter, "A Process Using Ozonated Water Solutions to Remove Photoresist after Metallization", Solid State Phenomena, Vols. 65-66, pp. 287-290, 1999
Online since
November 1998
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Price
$32.00
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