Industrial Trends in Wet Processing Technology |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
31-34 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.31 |
| Citation |
L.F.Tz. Kwakman et al., 1998, Solid State Phenomena, 65-66, 31 |
| Authors |
L.F.Tz. Kwakman, M. Geomini, Didier Lévy, D. Malgouyres |
| Keywords |
Equipment Utilization Rate, HF/Ozone Cleaning, Single/Dual Tank Immersion Tools |
| Full Paper |
Get the full paper by clicking here
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