Industrial Trends in Wet Processing Technology |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 31-34 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.31 |
| Authors | L.F.Tz. Kwakman, M. Geomini, Didier Lévy, D. Malgouyres |
| Keywords | Equipment Utilization Rate, HF/Ozone Cleaning, Single/Dual Tank Immersion Tools |
| Full Paper | 
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