Particle Addition Behaviour of Oxide Stripping by HF Solutions |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 35-38 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.35 |
| Authors | Enrico Bellandi, Mauro Alessandri, Francesco Pipia, A. Tonti |
| Keywords | Cleaning, Etching, HF |
| Full Paper | 
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