The Electrochemical Kinetics of Silicon Surface Corrosion in HF Containing Dilute Solutions |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 39-42 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.39 |
| Authors | V. Bertagna, F. Rouelle, R. Erre, M. Chemla |
| Keywords | HF, Passivation, Silicon |
| Full Paper | 
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