Chemistry of the Silicon Oxide Surface: Adsorption from SC1 Solutions |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
53-58 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.53 |
| Citation |
L. Hall et al., 1998, Solid State Phenomena, 65-66, 53 |
| Authors |
L. Hall, J. Sees, Trace Hurd, B. Schmidt, L. Bellay, Lee M. Loewenstein, Paul W. Mertens |
| Keywords |
Contamination, Metal Adsorption, Metal Deposition, SC-1 |
| Full Paper |
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