Chemistry of the Silicon Oxide Surface: Adsorption from SC1 Solutions |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 53-58 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.53 |
| Authors | L. Hall, J. Sees, Trace Hurd, B. Schmidt, L. Bellay, Lee M. Loewenstein, Paul W. Mertens |
| Keywords | Contamination, Metal Adsorption, Metal Deposition, SC-1 |
| Full Paper | 
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