Production of High Concentrations of Bubble-Free Dissolved Ozone in Water |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
59-62 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.59 |
| Citation |
C. Gottschalk et al., 1998, Solid State Phenomena, 65-66, 59 |
| Authors |
C. Gottschalk, U. Beuscher, S. Hardwick, Masakazu Kobayashi, J. Schweckendiek, M. Wikol |
| Keywords |
Contactor, Membrane, Ozone |
| Full Paper |
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