Si-Purifier: A Point of Use Purifier for Noble Metals in HF Baths |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
63-66 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.63 |
| Citation |
Alessio Beverina et al., 1998, Solid State Phenomena, 65-66, 63 |
| Authors |
Alessio Beverina, F. Tardif |
| Keywords |
Copper Deposition, Hydrofluoric Acid (HF), Noble Metal, Purifier, Silicon |
| Full Paper |
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