Production Performance of Single Tank Cleaning Processes for 0,25 μm Technology |
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| Journal | Solid State Phenomena (Volumes 65 - 66) |
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| Volume | Ultra Clean Processing of Silicon Surfaces IV |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 71-76 |
| DOI | 10.4028/www.scientific.net/SSP.65-66.71 |
| Citation | K. Penner et al., 1998, Solid State Phenomena, 65-66, 71 |
| Authors | K. Penner, K. Schupke, R. Pesce, J. Oshinowo, K. Wolke |
| Full Paper | 
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