Ozonated DI-Water for Clean Chemical Oxide Growth |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
77-80 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.77 |
| Citation |
I. Cornelissen et al., 1998, Solid State Phenomena, 65-66, 77 |
| Authors |
I. Cornelissen, Marc Meuris, K. Wolke, M. Wikol, Lee M. Loewenstein, G. Doumen, Marc M. Heyns |
| Keywords |
DI Water, Ozone, Solubility |
| Full Paper |
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