Paper Title:
Ozonated DI-Water for Clean Chemical Oxide Growth
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
77-80
DOI
10.4028/www.scientific.net/SSP.65-66.77
Citation
I. Cornelissen, M. Meuris, K. Wolke, M. Wikol, L. M. Loewenstein, G. Doumen, M. M. Heyns, "Ozonated DI-Water for Clean Chemical Oxide Growth", Solid State Phenomena, Vols. 65-66, pp. 77-80, 1999
Online since
November 1998
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Price
$32.00
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