Paper Title:
Ultra-Thin Oxide Growth on Silicon Using Ozonated Solutions
  Abstract

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Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
81-84
DOI
10.4028/www.scientific.net/SSP.65-66.81
Citation
F. De Smedt, C. Vinckier, I. Cornelissen, S. De Gendt, M. Meuris, G. Gilis, M. M. Heyns, "Ultra-Thin Oxide Growth on Silicon Using Ozonated Solutions", Solid State Phenomena, Vols. 65-66, pp. 81-84, 1999
Online since
November 1998
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Price
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