Ultra-Thin Oxide Growth on Silicon Using Ozonated Solutions |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
81-84 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.81 |
| Citation |
F. De Smedt et al., 1998, Solid State Phenomena, 65-66, 81 |
| Authors |
F. De Smedt, Chris Vinckier, I. Cornelissen, Stefan De Gendt, Marc Meuris, G. Gilis, Marc M. Heyns |
| Keywords |
Oxidation, Ozone |
| Full Paper |
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