Paper Title:
Post Dry-Etch Cleaning Issues of an Organic Low-K Dielectric
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
89-92
DOI
10.4028/www.scientific.net/SSP.65-66.89
Citation
F. Lanckmans, M. R. Baklanov, C. Alaerts, S. Vanhaelemeersch, K. Maex, "Post Dry-Etch Cleaning Issues of an Organic Low-K Dielectric", Solid State Phenomena, Vols. 65-66, pp. 89-92, 1999
Online since
November 1998
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Price
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