Vapor Phase Decomposition - Droplet Collection: Can we Improve the Collection Efficiency for Copper Contamination? |
| Journal |
Solid State Phenomena (Volumes 65 - 66) |
| Volume |
Ultra Clean Processing of Silicon Surfaces IV |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
93-96 |
| DOI |
10.4028/www.scientific.net/SSP.65-66.93 |
| Citation |
Stefan De Gendt et al., 1998, Solid State Phenomena, 65-66, 93 |
| Authors |
Stefan De Gendt, A. Huber, Bart Onsia, Sophia Arnauts, Karine Kenis, D. Martin Knotter, Paul W. Mertens, Marc M. Heyns |
| Keywords |
Copper (Cu), Preconcentration, Vapor Phase Decomposition - Droplet Collection (VPD-DC) |
| Full Paper |
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