Paper Title:
Characterization of the Post Dry Etch Cleaning of the Silicon Surface Prior to Silicon Epitaxial Growth
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 65-66)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
97-100
DOI
10.4028/www.scientific.net/SSP.65-66.97
Citation
Y.B. Kim, M. Caymax, H. Bender, S. Vanhaelemeersch, "Characterization of the Post Dry Etch Cleaning of the Silicon Surface Prior to Silicon Epitaxial Growth", Solid State Phenomena, Vols. 65-66, pp. 97-100, 1999
Online since
November 1998
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.