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Intrinsic Microcrystalline Silicon for Solar Cells

Journal Solid State Phenomena (Volumes 67 - 68)
Volume Polycrystalline Semiconductors V
Edited by J.H. Werner, H.P. Strunk, H.W. Schock
Pages 101-106
DOI 10.4028/www.scientific.net/SSP.67-68.101
Citation O. Vetterl et al., 1999, Solid State Phenomena, 67-68, 101
Authors O. Vetterl, P. Hapke, O. Kluth, A. Lambertz, S. Wieder, B. Rech, F. Finger, H. Wagner
Keywords Deposition Rate, Microcrystalline Silicon, Plasma Enhanced Chemical Vapour Deposition, Solar Cell, Very High Frequency Plasma
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