Intrinsic Microcrystalline Silicon for Solar Cells |
| Journal |
Solid State Phenomena (Volumes 67 - 68) |
| Volume |
Polycrystalline Semiconductors V |
| Edited by |
J.H. Werner, H.P. Strunk, H.W. Schock |
| Pages |
101-106 |
| DOI |
10.4028/www.scientific.net/SSP.67-68.101 |
| Citation |
O. Vetterl et al., 1999, Solid State Phenomena, 67-68, 101 |
| Authors |
O. Vetterl, P. Hapke, O. Kluth, A. Lambertz, S. Wieder, B. Rech, F. Finger, H. Wagner |
| Keywords |
Deposition Rate, Microcrystalline Silicon, Plasma Enhanced Chemical Vapour Deposition, Solar Cell, Very High Frequency Plasma |
| Full Paper |
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