Intrinsic Microcrystalline Silicon for Solar Cells |
| Journal |
Solid State Phenomena (Volumes 67 - 68) |
| Volume |
Polycrystalline Semiconductors V |
| Edited by |
J.H. Werner, H.P. Strunk, H.W. Schock |
| Pages |
101-106 |
| DOI |
10.4028/www.scientific.net/SSP.67-68.101 |
| Authors |
O. Vetterl,
P. Hapke,
O. Kluth,
A. Lambertz,
S. Wieder,
B. Rech,
F. Finger,
H. Wagner
|
| Keywords |
Deposition Rate, Microcrystalline Silicon, Plasma Enhanced Chemical Vapour Deposition, Solar Cell, Very High Frequency Plasma |
| Full Paper |
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|
