Paper Title:
Deposition of Microcrystalline Silicon Films by Magnetron Sputtering
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
107-112
DOI
10.4028/www.scientific.net/SSP.67-68.107
Citation
M. Tzolov, Y. Jeliazova, R. Carius, L. Houben, F. Finger, N. Tzenov, "Deposition of Microcrystalline Silicon Films by Magnetron Sputtering", Solid State Phenomena, Vols. 67-68, pp. 107-112, 1999
Online since
April 1999
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Price
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