Deposition of Microcrystalline Silicon Films by Magnetron Sputtering |
| Journal |
Solid State Phenomena (Volumes 67 - 68) |
| Volume |
Polycrystalline Semiconductors V |
| Edited by |
J.H. Werner, H.P. Strunk, H.W. Schock |
| Pages |
107-112 |
| DOI |
10.4028/www.scientific.net/SSP.67-68.107 |
| Citation |
M. Tzolov et al., 1999, Solid State Phenomena, 67-68, 107 |
| Authors |
M. Tzolov, Y. Jeliazova, Reinhard Carius, L. Houben, F. Finger, N. Tzenov |
| Keywords |
Growth Process, Magnetron Sputtering, Microcrystalline Silicon, Raman Scattering |
| Full Paper |
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