Thin Films Hydrogenated Silicon Deposited by Direct Current Magnetron Sputtering at High Rate |
| Journal |
Solid State Phenomena (Volumes 67 - 68) |
| Volume |
Polycrystalline Semiconductors V |
| Edited by |
J.H. Werner, H.P. Strunk, H.W. Schock |
| Pages |
113-118 |
| DOI |
10.4028/www.scientific.net/SSP.67-68.113 |
| Citation |
R. Cherfi et al., 1999, Solid State Phenomena, 67-68, 113 |
| Authors |
R. Cherfi, G. Farhi, M. Aoucher |
| Keywords |
Conductivity, Deposition, Optical Absorption, Photoconductivity, Silicon, Sputtering |
| Full Paper |
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