Paper Title:
Low-Temperature Deposition of Microcrystalline Silicon by Microwave Plasma-Enhanced Sputtering
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
119-124
DOI
10.4028/www.scientific.net/SSP.67-68.119
Citation
P. Müller, W.M. Holber, W. Henrion, E. Nebauer, V. Schlosser, B. Selle, I. Sieber, W. Fuhs, "Low-Temperature Deposition of Microcrystalline Silicon by Microwave Plasma-Enhanced Sputtering", Solid State Phenomena, Vols. 67-68, pp. 119-124, 1999
Online since
April 1999
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