Paper Title:
Influence of Deposit Thickness on the Microstructure and Surface Roughness of Silicon Films Deposited from Silane
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
125-130
DOI
10.4028/www.scientific.net/SSP.67-68.125
Citation
B. Caussat, J.P. Couderc, L. Vasquez, A. Figueras, A. Vander Lee, D. Cot, J. Durand, V. Paillard, E. Scheid, B. Legros-de Mauduit, A. Vilà, J.R. Morante, "Influence of Deposit Thickness on the Microstructure and Surface Roughness of Silicon Films Deposited from Silane", Solid State Phenomena, Vols. 67-68, pp. 125-130, 1999
Online since
April 1999
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