Paper Title:
Characterisation of Excimer Laser Crystallised Polysilicon by X-Ray Diffraction and by Channeling Contrast in a Scanning Electron Microscope
  Abstract

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Periodical
Solid State Phenomena (Volumes 67-68)
Edited by
J.H. Werner, H.P. Strunk, H.W. Schock
Pages
181-186
DOI
10.4028/www.scientific.net/SSP.67-68.181
Citation
S. Loreti, M. Vittori, L. Mariucci, G. Fortunato, "Characterisation of Excimer Laser Crystallised Polysilicon by X-Ray Diffraction and by Channeling Contrast in a Scanning Electron Microscope", Solid State Phenomena, Vols. 67-68, pp. 181-186, 1999
Online since
April 1999
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